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English-taught Master's degree programs

Microsystems Engineering

Master of Science (M.Sc.)

Language of instruction:


Academic calendar:

Winter Semester

Standard Period of Study:

4 semesters required for the full degree programme

Scope of services:

120 ECTS-Points for the full degree programme

Admission: First semester:

with special prerequisites for admission
The admissions restrictions are determined by the admissions regulations for the individual field. For more detailed information, please visit your departmental academic advisor.

Higher semesters:

with special prerequisites for admission according to admission regulations

Application period: First semester: Non-EU-Citizens: 1 March - 31 May, EU-Citizens: 1 March - 15 July
Higher semesters: Winter Semester: 1 March - 30 September, Summer Semester: 1 November - 31 March
Important information regarding required application materials for higher semesters.
Application: Please check out the programme website before you apply.
Application for this subject is only possible during the application period and is done online.
Faculty affiliation: Faculty of Engineering

Microsystems, MEMS or micromachines – many names for an exciting and dynamic engineering discipline which combines expertise from areas as diverse as electrical and mechanical engineering, materials, life sciences and many more.

With 22 professors and about 300 research and technical staff, our Department of Microsystems Engineering (IMTEK) is one of the world’s largest academic institutions in this field. We are dedicated to interdisciplinary high-tech research with a strong focus on its application.

During the first year, you have five mandatory courses (Micro-electronics, Micro-mechanics, Microsystems Technologies and Processes, Microsystems Design Lab I as well as Signal Processing). In addition, you will choose five out of eight compulsory elective courses.


You can specialize in one of the following areas:

  • Circuits and Systems
  • Biomedical Engineering
  • Materials and Fabrication
  • Photonics

Please note:
From the summer semester 2020 on there may be deviations from individual regulations of the admission regulations, selection and entrance examination regulations as well as the study and examination regulations from the Corona Statutes [de].

The versions of statutes with relevance to teaching and learning provided on this page by the Department of Legal Affairs (in particular admission and selection regulations as well as subject and examination regulations) are primarily for information purposes. This means that all amendments subsequently agreed upon by the University Senate have been integrated into the respective text of the original statutes; in the case of the examination regulations for bachelor's and master's degree programmes, this generally relates to extracts of the respective examination regulations (framework examination regulations, subject-specific provisions, and appendices).
The greatest care has been taken in writing these versions. Nevertheless, it cannot be entirely ruled out that errors may have occurred. Consequently, it is solely the officially announced statutes and statute amendments that are legally binding, i.e. as published in the Amtlichen Bekanntmachungen der Albert-Ludwigs-Universität Freiburg im Breisgau [de] or, up to the year 2000, in the official gazette of the Baden-Württemberg Ministry of Science, Research and the Arts.

Central Academic Advising Office

The University's Service Centre Studies - Central Student Advisory Service (ZSB) provides information and advice on all questions that may arise prior to, at the beginning of, and during a course of study. If you are seeking subject-specific advice in addition to this, you can also contact the respective subject academic advisor.

Departmental Academic Advising

Academic Advising
Dr. Jochen Kieninger
Georges-Köhler-Allee 106 (04-012)
79110 Freiburg
Tel.: +49 761 203-8341

Dr. Oswald Prucker
Georges-Köhler-Allee 103
Gebäude 103, 3. OG, Büro 105
Tel: 0761 203-7164

Questions on Application
Ursula Epe
Gebäude 101, 2. OG, Büro 02-013a
Georges-Köhler-Allee 101
79110 Freiburg
Tel.: +49 761 203-8340

Siehe hier:

Program Coordinator
Svenja  Andresen
Raum 106 01 011
Georges-Köhler-Allee 106
79110 Freiburg
Tel.: +49 761 203 97940
Sprechstunde: Siehe:

Examination Office

Georges-Köhler-Allee 101, 79110 Freiburg
Fax: +49(0) 761-203-8082

Anne-Julchen Müller, Telefon: 0761 203-8083
Susanne Stork, Telefon: 0761 203-8087
Montag 14.00 Uhr bis 16.00 Uhr
Dienstag und Donnerstag 10.00 Uhr bis 12.00 Uhr
Mittwoch und Freitag: nur telefonisch